SRAM formation using shadow implantation

ABSTRACT

A method of doping fins of a semiconductor device that includes a substrate includes forming multiple fin structures on the substrate, each of the fin structures including a cap formed on a fin. The method further includes performing a first tilt angle implant process to dope a first pair of the multiple fin structures with n-type impurities and performing a second tilt angle implant process to dope a second pair of the multiple fin structures with p-type impurities.

RELATED APPLICATION

The instant application is a divisional of U.S. application Ser. No.10/728,910, filed Dec. 8, 2003 now U.S. Pat. No. 6,924,561, thedisclosure of which is incorporated by reference herein.

FIELD OF THE INVENTION

The present invention relates generally to semiconductor devices and,more particularly, to systems and methods for creating static randomaccess memory (SRAM) using shadow implanting techniques.

BACKGROUND OF THE INVENTION

The escalating demands for high density and performance associated withultra large scale integration semiconductor devices require designfeatures, such as gate lengths, below 100 nanometers (nm), highreliability, and increased manufacturing throughput. The reduction ofdesign features below 100 nm challenges the limitations of conventionalmethodology.

Double-gate MOSFETs represent devices that are candidates for succeedingexisting planar MOSFETs. In double-gate MOSFETs, the use of two gates tocontrol the channel significantly suppresses short-channel effects. AFinFET is a double-gate structure that includes a channel formed in avertical fin. Although a double-gate structure, the FinFET is similar toexisting planar MOSFETs in layout and fabrication techniques. The FinFETalso provides a range of channel lengths, CMOS compatibility, and largepacking density compared to other double-gate structures.

SUMMARY OF THE INVENTION

Implementations consistent with the principles of the invention useshadow implanting of tightly spaced FinFET devices to producehigh-density SRAM cells. Utilization of shadowed N/P implants permitsreduction of SRAM cell size by approximately 40-50%.

In one aspect consistent with the principles of the invention, a methodof doping fins of a semiconductor device that includes a substrate isprovided. The method may include forming multiple fin structures on thesubstrate, each of the fin structures including a cap formed on a fin.The method may further include performing a first tilt angle implantprocess to dope a first pair of the multiple fin structures with n-typeimpurities and performing a second tilt angle implant process to dope asecond pair of the multiple fin structures with p-type impurities.

According to a further aspect, a method may include forming a first finand a second fin substantially parallel to one another, the first finand the second fin having a first width and being located a firstdistance from one another. The method may further include forming athird fin and a fourth fin substantially parallel to one another, thethird and fourth fin having the first width and being located a seconddistance from one another, where the second fin and the third fin areformed substantially parallel to one another and located a thirddistance from one another and where the third distance is greater thanthe first distance and the second distance. The method may also includeforming a cap on each of the first, second, third and fourth fins. Themethod may additionally include implanting, at a first tilt angle, firstvertical surfaces of the first and third fins with n-type impurities andimplanting, at a second tilt angle, first vertical surfaces of thesecond and fourth fins with p-type impurities.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are incorporated in and constitute apart of this specification, illustrate an embodiment of the inventionand, together with the description, explain the invention. In thedrawings,

FIG. 1 illustrates a silicon on insulator structure consistent with theinvention;

FIGS. 2A and 2B illustrate exemplary fin formation consistent with theinvention;

FIGS. 3A and 3B illustrate exemplary N implantation using shadowingtechniques consistent with the invention;

FIGS. 4A and 4B illustrate exemplary P implantation using shadowingtechniques consistent with the invention;

FIGS. 5A, 5B, 6A and 6B illustrate additional shadow implantationtechniques consistent with the invention;

FIG. 7 illustrates exemplary gate and M1 jumper formation consistentwith the invention;

FIG. 8 illustrates exemplary gate interconnect formation consistent withthe invention; and

FIG. 9 illustrates an exemplary SRAM formed using shadow implantationtechniques consistent with the invention.

DETAILED DESCRIPTION

The following detailed description of implementations consistent withthe present invention refers to the accompanying drawings. The samereference numbers in different drawings may identify the same or similarelements. Also, the following detailed description does not limit theinvention. Instead, the scope of the invention is defined by theappended claims and their equivalents.

Implementations consistent with the principles of the invention providetechniques for fabricating high-density SRAM cells using shadowedimplant techniques.

FIG. 1 illustrates a cross-section of a silicon on insulator (SOI)structure 100 formed in accordance with implementations consistent withthe invention. SOI 100 may include a buried oxide layer on a siliconsubstrate (collectively shown in FIG. 1 as substrate 110) and a siliconlayer 120 formed on the buried oxide layer. In alternativeimplementations, substrate 110 and layer 120 may include othersemiconductor materials, such as germanium, or combinations ofsemiconductor materials, such as silicon-germanium. The buried oxidelayer may include a silicon oxide or other types of dielectricmaterials.

Silicon layer 120 may be formed on substrate 110 using a conventionaldeposition technique. The thickness of silicon layer 120 may range fromabout 50 Å to 500 Å. In an exemplary implementation, silicon layer 120may be deposited to a thickness of approximately 50 Å. It will beappreciated that silicon layer 120 may be used to form one or more fins.

A thick cap layer 130 (or hard mask) may be formed on top of siliconlayer 120 to aid in pattern optimization and protect silicon layer 120during subsequent processing. Cap layer 130 may, for example, include asilicon nitride material or some other type of material capable ofprotecting silicon layer 120 during the fabrication process. Cap layer130 may be deposited, for example, by chemical vapor deposition (CVD) toa thickness ranging from approximately 50 Å to 200 Å. In an exemplaryimplementation, cap layer 130 may be deposited to a thickness ofapproximately 50 Å.

Silicon layer 120 may be patterned by conventional lithographictechniques (e.g., optical or electron beam (EB) lithography). Siliconlayer 120 may then be etched using well-known etching techniques to formmultiple fin structures 210A, 2101B, 220A and 220B, as illustrated inFIG. 2A. FIG. 2B shows a three dimensional view of FIG. 2A.

As shown in FIGS. 2A and 2B, fin structure 210A/220A includes a fin212A/222A and a cap 214A/224A and fin structure 210B/220B includes a fin212B/222B and a cap 214B/224B. Caps 214A/224A may remain covering fin212A/222A and caps 214B/224B may remain covering fin 212B/222B. Thewidth of fin structures 210A, 220A, 210B and 220B may range fromapproximately 50 Å to 500 Å. In an exemplary implementation, the widthof each of fin structures 210A, 220A, 210B and 220B may be approximately50 Å. A distance d₁ between side surfaces of fin structure 210A and finstructure 220A and between side surfaces of fin structure 210B and 220Bmay be approximately twice the width of fin structures 210A and 220A. d₁may, thus, range from approximately 100 Å to 1000 Å. A distance d₂between side surfaces of fin structure 220A and 210B may beapproximately four times the width of fin structures 220A and 210B. d₂may, thus, range from approximately 200 Å to 2000 Å. In oneimplementation, for example, the distance d₁ may be approximately 100 Åand the distance d₂ may be approximately 200 Å.

A tilt angle implant process may then be performed to dope fins 212A,212B, 222A and 222B. For example, a conventional implant process ofn-type impurities, such as arsenic or phosphorus, may be performed todope fins 212A and 212B, as illustrated in FIG. 3A. FIG. 3B shows athree dimensional view of FIG. 3A. As shown in FIGS. 3A and 3B, n-typeimpurities may be implanted at an angle ranging from approximately 40degrees to 50 degrees. In an exemplary implementation, the implantprocess may be performed at an angle of approximately 45 degrees. Theparticular angle used may be dependent upon the height of cap 214/224.For example, if the height of cap 214/224 is approximately equal to theheight of fin 212/222, then the angle used may be less than or equal to45 degrees.

The n-type impurities may be implanted at a dosage of about 5×10¹⁴atoms/cm² to about 1×10¹⁵ atoms/cm² and an implantation energy of about3-6 KeV for phosphorus or about 5-10 KeV for arsenic, which may dependon the thickness of fin 212. After the implant process is complete, fins212A and 212B may include silicon doped predominately, or only, withn-type impurities, as illustrated in FIGS. 3A and 3B.

As shown in FIGS. 3A and 3B, the implanting of n-type impurities doesnot dope fins 222A and 222B. There are several factors that aid inpreventing the n-type impurities from reaching fins 222A and 222B. Forexample, the presence, height, and closeness of fin structure 210shields or shadows fin 222, thereby blocking the n-type impurities fromreaching fin 222. The presence of cap 224 also helps block the n-typeimpurities.

A tilt angle implant process of p-type impurities, such as boron or BF₂,may be performed to dope fins 222A and 222B, as illustrated in FIG. 4A.FIG. 4B shows a three dimensional view of FIG. 4A. As shown in FIGS. 4Aand 4B, p-type impurities may be implanted at an angle ranging fromapproximately 40 degrees to 50 degrees. In an exemplary implementation,the implant process may be performed at an angle of approximately 45degrees. The particular angle used may be dependent upon the height ofcap 214/224. For example, if the height of cap 214/224 is approximatelyequal to the height of fin 212/222, then the angle used may be less thanor equal to 45 degrees.

The p-type impurities may be implanted at a dosage of about 5×10¹⁴atoms/cm² to about 1×10¹⁵ atoms/cm² and an implantation energy of about2 KeV to about 3 KeV for boron, which may depend on the thickness of fin222. After the implant process is complete, fins 222A and 222B mayinclude silicon doped predominately, or only, with p-type impurities, asillustrated in FIGS. 4A and 4B.

As shown in FIGS. 4A and 4B, the implanting of p-type impurities doesnot dope fins 212A and 212B. There are several factors that aid inpreventing the p-type impurities from reaching fins 212A and 212B. Forexample, the presence, height, and closeness of fin structure 220shields or shadows fin 212 blocks the p-type impurities from reachingfin 212. The presence of cap 224 also helps block the p-type impurities.

It may also be desirable to dope fins 212 and 222 from the other side(i.e., the sides of fins 212 and 222 facing each other). This may bedesirable in instances where the dopant does not fully dope fins 212 and222.

In this case, a hardened resist may optionally be formed on non-shadowedsides of fin structures 210 and 220. Another group of tilt angle implantprocesses may then optionally be performed to dope fins 212A, 212B, 222Aand 222B. For example, a hardened resist 510 may be formed on thenon-shadowed side surface of fin structure 220, as illustrated in FIG.5A. FIG. 5B shows a three dimensional view of FIG. 5A. Resist 510 may beformed to a thickness ranging from approximately 100 Å to 200 Å. In anexemplary implementation, resist 510 may be formed to a thickness ofapproximately 150 Å. While FIG. 5B shows resist 510 covering only aportion of fin structure 220, resist 510 may be formed to cover theentire non-shadowed side of fin structure 220.

A conventional implant process of n-type impurities, such as arsenic orphosphorus, may be performed to dope fins 212A and 212B, as illustratedin FIGS. 5A and 5B. The n-type impurities may be implanted at an angleranging from approximately 40 degrees to 50 degrees. In an exemplaryimplementation, the implant process may be performed at an angle ofapproximately 45 degrees.

The n-type impurities may be implanted at a dosage of about 5×10¹⁴atoms/cm² to about 1×10¹⁵ atoms/cm² and an implantation energy of about3-6 KeV for phosphorus or about 5-10 KeV for arsenic, which may dependon the thickness of fin 212. After the implant process is complete, fins212A and 212B may include silicon doped predominately, or only, withn-type impurities, as illustrated in FIGS. 5A and 5B. The implanting ofn-type impurities does not dope fins 222A and 222B. For example, resist510 and cap 224 block the n-type impurities from reaching fins 222A and222B.

A hardened resist 610 may optionally be formed on the non-shadowed sidesurface of fin structures 212A and 212B, as illustrated in FIG. 6A. FIG.6B shows a three dimensional view of FIG. 6A. Resist 610 may be formedto a thickness ranging from approximately 100 Å to 200 Å. In anexemplary implementation, resist 610 may be formed to a thickness ofapproximately 150 Å. While FIG. 6B shows resist 610 covering only aportion of fin structures 210A and 210B, resist 610 may be formed tocover the entire non-shadowed side of fin structures 210A and 210B.

A conventional implant process of p-type impurities, such as boron orBF₂, may then be optionally performed to dope fins 222A and 222B, asillustrated in FIGS. 6A and 6B. The p-type impurities may be implantedat an angle ranging from approximately 40 degrees to 50 degrees. In anexemplary implementation, the implant process may be performed at anangle of approximately 45 degrees.

The p-type impurities may be implanted at a dosage of about 5×10¹⁴atoms/cm² to about 1×10¹⁵ atoms/cm² and an implantation energy of about2 KeV to about 3 KeV for boron, which may depend on the thickness offins 222A and 222B. After the implant process is complete, fins 222A and222B may include silicon doped predominately, or only, with p-typeimpurities, as illustrated in FIGS. 6A and 6B. The implanting of p-typeimpurities does not dope fins 212A and 212B. For example, resist 610 andcap 214 block the p-type impurities from reaching fin 212.

After doping of fins 212A, 212B, 222A and 222B, conventional FinFETfabrication processing can be used to complete the transistor (e.g.,forming the source and drain regions, contacts, interconnects andinter-level dielectrics for the FinFET device). For example, anyremaining resist 510 or 610 may be stripped. Also, caps 214 and 224 maybe removed.

As illustrated in FIG. 7, a selective oxide strip 710 may be grown onfins 212A and 222A. Oxide strip 710 maybe etched and a gate 720 and M1jumper 730 maybe formed by depositing and patterning polysilicon overfins 212A, 222A, 212B and 222B, as illustrated in FIG. 7. Polysiliconmay then be deposited and patterned for forming the contacts andinterconnect 810, as illustrated in FIG. 8.

Conventional processing may then be performed to complete the SRAMdevice. FIG. 9 illustrates a FinFET SRAM device 900 that may be formedfrom the above-processing. As illustrated, SRAM device 900 includes agroup of separate M2 bitline contacts 910, an M1 wordline 920, an M1jumper 730, a gate 720, and a gate interconnect 810.

CONCLUSION

Systems and methods consistent with the principles of the inventionprovide tightly spaced n-channel and p-channel fins for a SRAM cell. Inimplementations consistent with the present invention, the fins may bedoped using shadowed implant techniques.

The foregoing description of exemplary embodiments of the presentinvention provides illustration and description, but is not intended tobe exhaustive or to limit the invention to the precise form disclosed.Modifications and variations are possible in light of the aboveteachings or may be acquired from practice of the invention.

For example, in the above descriptions, numerous specific details areset forth, such as specific materials, structures, chemicals, processes,etc., in order to provide a thorough understanding of implementationsconsistent with the present invention. These implementations and otherimplementations can be practiced, however, without resorting to thedetails specifically set forth herein. In other instances, well knownprocessing structures have not been described in detail, in order not tounnecessarily obscure the thrust of the present invention. In practicingthe present invention, conventional deposition, photolithographic andetching techniques may be employed, and hence, the details of suchtechniques have not been set forth herein in detail.

While a series of acts has been described with regard to FIGS. 1-9, theorder of the acts may be varied in other implementations consistent withthe present invention. Moreover, non-dependent acts may be implementedin parallel.

No element, act, or instruction used in the description of the presentapplication should be construed as critical or essential to theinvention unless explicitly described as such. Also, as used herein, thearticle “a” is intended to include one or more items. Where only oneitem is intended, the term “one” or similar language is used. The scopeof the invention is defined by the claims and their equivalents.

1. A method of doping fins of a semiconductor device that includes asubstrate, the method comprising: forming a plurality of fin structureson the substrate, each of the fin structures including a cap formed on afin; performing a first tilt angle implant process to dope a first pairof the plurality of fin structures with n-type impurities; andperforming a second tilt angle implant process to dope a second pair ofthe plurality of fin structures with p-type impurities.
 2. The method ofclaim 1, wherein a width of each of the fin structures ranges from about50 Å to about 500 Å.
 3. The method of claim 1, wherein a first distancebetween a first fin structure of the plurality of fin structures and asecond fin structure of the plurality of fin structures ranges fromabout 100 Å to about 1000 Å and a second distance between the second finstructure and a third fin structure of the plurality of fin structuresranges from about 200 Å to about 2000 Å.
 4. The method of claim 1,wherein a height of each of the fins ranges from about 50 Å to about 500Å.
 5. The method of claim 1, wherein the first tilt angle implantprocess is performed at an angle ranging from about 40 degrees to about50 degrees.
 6. The method of claim 1, wherein the second tilt angleimplant process is performed at an angle ranging from about 40 degreesto about 50 degrees.
 7. The method of claim 1, further comprising:performing a third tilt angle implant process to further dope the firstpair of the plurality of fin structures with n-type impurities; andperforming a fourth tilt angle implant process to further dope thesecond pair of the plurality of fin structures with p-type impurities.8. The method of claim 7, wherein the third tilt angle implant processis performed at an angle ranging from about 40 degrees to about 50degrees.
 9. The method of claim 7, wherein the fourth tilt angle implantprocess is performed at an angle ranging from about 40 degrees to about50 degrees.
 10. A method, comprising: forming a first fin and a secondfin substantially parallel to one another, the first fin and the secondfin having a first width and being located a first distance from oneanother; forming a third fin and a fourth fin substantially parallel toone another, the third and fourth fin having the first width and beinglocated a second distance from one another, wherein the second fin andthe third fin are formed substantially parallel to one another andlocated a third distance from one another and wherein the third distanceis greater than the first distance and the second distance; forming acap on each of the first, second, third and fourth fins; implanting, ata first tilt angle, first vertical surfaces of the first and third finswith n-type impurities; and implanting, at a second tilt angle, firstvertical surfaces of the second and fourth fins with p-type impurities.11. The method of claim 10, wherein the first and second distances areapproximately twice the first width and wherein the third distance isapproximately four times the first width.
 12. The method of claim 10,further comprising: implanting, at a third tilt angle, second verticalsurfaces of the first and third fins with n-type impurities; andimplanting, at a fourth tilt angle, second vertical surfaces of thesecond and fourth fins with p-type impurities.
 13. The method of claim10, wherein the first tilt angle comprises an angle to the firstvertical surfaces of the first and third fins ranging from about 40degrees to about 50 degrees.
 14. The method of claim 13, wherein thesecond tilt angle comprises an angle to the first vertical surfaces ofthe second and fourth fins ranging from about 40 degrees to about 50degrees.
 15. The method of claim 12, wherein the third tilt anglecomprises an angle to the second vertical surfaces of the first andthird fins ranging from about 40 degrees to about 50 degrees.
 16. Themethod of claim 15, wherein the fourth tilt angle comprises an angle tothe second vertical surfaces of the second and fourth fins ranging fromabout 40 degrees to about 50 degrees.
 17. The method of claim 12,further comprising: forming a layer of resist material on the firstvertical surfaces of the second and fourth fins prior to implanting atthe third tilt angle; and forming a layer of resist material on thefirst vertical surfaces of the first and third fins prior to implantingat the fourth tilt angle.
 18. The method of claim 10, wherein the firstwidth ranges from about 50 Å to about 500 Å.
 19. The method of claim 10,wherein the cap is formed to a thickness ranging from about 50 Å toabout 200 Å.
 20. The method of claim 10, wherein implanting the firstvertical surfaces of the first and third fins with n-type impuritiescomprises: implanting phosphorous at an implantation energy of about 3-6KeV or arsenic at an implantation energy of about 5-10 KeV, whereinimplanting the first vertical surfaces of the second and fourth finswith p-type impurities comprises: implanting boron at an implantationenergy of about 2-3 KeV.